Large-Stroke Capacitive MEMS Accelerometer Without Pull-In

In this study, the feasibility of obtaining electrical read-out data from a capacitive MEMS accelerometer that employs repulsive electrode configuration is demonstrated. This allows for large-stroke vibrations microstructures without suffering pull-in failure exists in conventional accelerometers based on parallel-plate configuration. With initial fabrication gap 2.75μm, can reach 4.2μm dynamical displacement amplitude. The tested up to 95(V) exhibiting failure. For comparison, voltage an with same dimensions but 0.8(V). device fabricated using POLYMUMPs standard. An circuit built measure capacitance change due motion proof-mass. has mechanical sensitivity 35nm/g and 5.3mV/g. ability use large bias voltages typical adverse effects stability moving will enable design enhanced resolution tunable frequency range.